Micro-optical switch and method for manufacturing the same

Micro-oscillating element provided with torsion bar

Micro-oscillating member, light-deflector, and image-forming...

Microactuator for optical switching and method for...

Microelectromechanical mirrors and electrically-programmable...

Microelectromechanical television scanning device and method for

Micromachined device with stretchable restoring force member

Micromachined mirror with stretchable restoring force member

Micromachined scanning torsion mirror and method

Micromechanical device having an improved beam

Micromechanical device having an improved beam

Micromechanical device manufactured out of incompatible material

Micromechanical device with adjustable resonant frequency by...

Micromechanical light modulator with optically interlaced output

Micromechanical optical element having a reflective surface...

Micromirror actuator

Micromirror actuator and method of manufacturing the same

Micromirror device and projector employing the same

Micromirror device with a single address electrode

Micromirror system