Micromechanical optical element having a reflective surface...

Details Micromechanical optical element having a reflective surface... Micromechanical optical element having a reflective surface...

2008-05-06

2008-05-06

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S221200, C359S872000

Reexamination Certificate

active

07369288

ABSTRACT:
By way of example, it would also be possible to dispense in a manner which is not illustrated with the spring elements2, and then for the element1to carry out an oscillating translational deflection. Micromechanical optical elements have a reflective surface which can be deflected electrostatically or electromagnetically in a known manner and which can be used for a large number of applications. The objective is to provide an element such as this at low cost and with improved dynamic deformation behaviour. The elements with a reflective surface are in this case held by spring elements, in which case the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements.

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