Micromirror device with a single address electrode

Details Micromirror device with a single address electrode Micromirror device with a single address electrode

2011-03-15

2011-03-15

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07907320

ABSTRACT:
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable, an address electrode having first and second regions arranged across the deflection axis of each mirror, a driving circuit for controlling a deflection of the mirror, and a stopper provided in a position of making contact with the mirror in a deflected state of the mirror. When the mirror makes contact with the stopper, the potential of the mirror or the stopper changes.

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