Micromirror actuator and method of manufacturing the same

Details Micromirror actuator and method of manufacturing the same Micromirror actuator and method of manufacturing the same

2005-05-17

2005-05-17

Shafer, Ricky D. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S291000, C359S295000

Reexamination Certificate

active

06894819

ABSTRACT:
A micromirror actuator includes a first substrate, at least one lower electrode, a micromirror, a two part second substrate, an upper electrode, a pair of support posts, and torsion bars. In the first substrate, a trench having a predetermined shape is formed. The lower electrode is formed in the trench. The micromirror faces the trench to be operative to pivot due to electrostatic forces and selectively to reflect incident light depending on pivoting positions thereof. The parts of the second substrate are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevent the deformation of the micromirror. The upper electrode is formed on a portion of the second substrate on the first substrate and applies power to the micromirror. The pair of support posts protrude from the first substrate beside both sides of the trench. The torsion bars connect both sides of the micromirror to the pair of support posts.

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