Measuring device for changing an angular position of a...
Mechanical acceleration sensor
Mechanical decoupling device for monolithic differential...
Mechanical force sensing semiconductor device
Mechanical force sensing semiconductor device
Mechanical resonance, silicon accelerometer
Mechanical resonance, silicon accelerometer
Mechanical resonator arrangements
Mechanical resonator for a rotation sensor
Mechanical resonator having a variable resonance frequency
Mechanical speed governor for an internal combustion engine
Medical application for no-motion sensor
MEM structure having reduced spring stiction
MEMS accelerometer
MEMS device and method of reducing stiction in a MEMS device
MEMS device with thinned comb fingers
MEMS force balance accelerometer
MEMS gyroscope having mass vibrating vertically on substrate
MEMS gyroscope with horizontally oriented drive electrodes
MEMS gyroscope with output oscillation about the normal to...