MEMS device with thinned comb fingers

Details MEMS device with thinned comb fingers MEMS device with thinned comb fingers

2007-08-21

2007-08-21

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504140

Reexamination Certificate

active

11076193

ABSTRACT:
Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a portion of their length relative to other comb fingers.

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