Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1995-07-27
1997-05-06
Raevis, Robert
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351416, 3612833, G01P 15125
Patent
active
056273185
ABSTRACT:
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.
REFERENCES:
patent: 4483194 (1984-11-01), Rudolf
patent: 4574327 (1986-03-01), Wilner
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4609968 (1986-09-01), Wilner
patent: 4653326 (1987-03-01), Danel et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4711128 (1987-12-01), Boura
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4783237 (1988-11-01), Aine et al.
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4922756 (1990-05-01), Henrion
patent: 5016072 (1991-05-01), Greiff
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5151763 (1992-09-01), Marek et al.
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5277053 (1994-01-01), McLane et al.
patent: 5313836 (1994-05-01), Fujii
patent: 5335544 (1994-08-01), Wagner et al.
patent: 5417312 (1995-05-01), Tsuchitani et al.
Richard S. Payne et al, "Surface Micromachined Accelerometer: A Technology Update", SAE International, Feb. 25, 1991, pp. 127-135.
Fujii Tetsuo
Imai Masahito
Kwok Helen C.
Nippondenso Co. Ltd.
Raevis Robert
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