Mechanical resonance, silicon accelerometer

Details Mechanical resonance, silicon accelerometer Mechanical resonance, silicon accelerometer

1997-02-10

1998-07-14

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351418, 7351438, G01P 1508

Patent

active

057807426

ABSTRACT:
A silicon accelerometer includes a plurality of silicon layers. The silicon layers form first and second silicon beams supported by flexure members. An acceleration responsive silicon mass is arranged to bend the flexure members in response to accelerations. The silicon beams are vibrated in vacuum chambers and gas damping is provided for the acceleration responsive mass and the flexure members. A sensor is provided for sensing vibration of the first and second silicon beams.

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