MEMS gyroscope having mass vibrating vertically on substrate

Details MEMS gyroscope having mass vibrating vertically on substrate MEMS gyroscope having mass vibrating vertically on substrate

2005-07-12

2005-07-12

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

06915693

ABSTRACT:
X type MEMS gyroscope has a first mass vertically vibrating on a substrate and a second mass horizontally vibrating on the substrate. A driving electrode is disposed on the same surface with the first mass. The first mass can move in relation to the second mass in the vertical direction, and is fixed in relation to the second mass in the horizontal direction. The second mass is operative to be moved in a horizontal direction in relation to the substrate by a Coriolis force, which is generated by an angular velocity applied while the first mass is being vibrated. A sensing electrode measures displacement of the second mass in the horizontal direction. All moving electrodes and stationary electrodes are disposed on the same surface, and all elements are manufactured by using one mask. Therefore, adhesion between the moving and stationary electrodes is prevented and the manufacturing process is simplified.

REFERENCES:
patent: 5691471 (1997-11-01), Okazaki et al.
patent: 6349597 (2002-02-01), Folkmer et al.
patent: 2001/0022106 (2001-09-01), Kato et al.
patent: 196 41 284 (1998-05-01), None
Japanese Abstract No. 2000-304547, dated Nov. 2, 2000.

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