MEMS accelerometer

Details MEMS accelerometer MEMS accelerometer

2008-10-08

2011-11-29

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

08065915

ABSTRACT:
Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the proof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

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