MEMS device and method of reducing stiction in a MEMS device

Details MEMS device and method of reducing stiction in a MEMS device MEMS device and method of reducing stiction in a MEMS device

2006-07-19

2009-12-08

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514010, C073S514160, C073S514380

Reexamination Certificate

active

07628072

ABSTRACT:
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.

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