MEMS force balance accelerometer

Details MEMS force balance accelerometer MEMS force balance accelerometer

2011-08-16

2011-08-16

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07997136

ABSTRACT:
Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

REFERENCES:
patent: 4088027 (1978-05-01), Hernandez et al.
patent: 4510802 (1985-04-01), Peters
patent: 4726228 (1988-02-01), Norling
patent: 4854169 (1989-08-01), Sakuma et al.
patent: 4944184 (1990-07-01), Blake et al.
patent: 5524488 (1996-06-01), Foote
patent: 5693883 (1997-12-01), Giroud et al.
patent: 5731703 (1998-03-01), Bernstein et al.
patent: 5739431 (1998-04-01), Petri
patent: 6422076 (2002-07-01), Prokofiev et al.
patent: 6664786 (2003-12-01), Kretschmann et al.
patent: 6776042 (2004-08-01), Pike et al.
patent: 7191654 (2007-03-01), Dwyer et al.
patent: 7303935 (2007-12-01), DeNatale et al.
patent: 7346981 (2008-03-01), Borwick, III et al.
patent: 7347097 (2008-03-01), Chernyak et al.
patent: 2003/0140699 (2003-07-01), Pike et al.
patent: 2010/0083760 (2010-04-01), Dwyer
patent: 2637984 (1990-04-01), None

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