Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-05-02
2006-05-02
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120, C073S504020
Reexamination Certificate
active
07036373
ABSTRACT:
Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present invention can include at least one substrate including one or more horizontal drive electrodes, and a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes. The horizontal drive electrodes and/or movable electrode can be configured to eliminate or reduce rate bias and scale factor errors resulting from the displacement of the movable electrode in the direction of a sense axis of the device.
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Johnson Burgess R.
Weber Mark W.
Honeywell International
Honeywell International , Inc.
Kwok Helen
Tufte Crompton Seager
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