Skewed axis inertial sensor assembly
Small angle bias measurement mechanism for MEMS instruments
SOI-MEMS gyroscope having three-fold symmetry
Solid state vibrating gyro
Solid-state gyroscopes and planar three-axis inertial...
Solid-state inertial sensor on chip
Sonic vibrating bell gyro
Spin coupled, angular rate sensitive inertial sensors with mount
Spin coupled, angular rate sensitive inertial sensors with optio
Spin rate compensator
Split electrode to minimize charge transients, motor amplitude m
Split-resonator integrated-post MEMS gyroscope
Spring for a resonance ring of an angular rate sensor
Stabilization and oscillation of an acoustically levitated objec
Stemless hemispherical resonator gyroscope
Stemless hemispherical resonator gyroscope
Structural design for improving the sensitivity of a...
Structure for attenuation or cancellation of quadrature error
Structure of angular rate sensor for minimizing output noise
Structures for supporting vibrators and devices for...