Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-04-03
2007-04-03
Williams, Hezron (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120
Reexamination Certificate
active
11375029
ABSTRACT:
The present invention relates to a z-axial solid-state gyroscope. Its main configuration is manufactured with a conductive material and includes two sets of a proof mass and two driver bodies suspended between two plates by an elastic beam assembly. Both surfaces of the driver bodies and the proof masses respectively include a number of grooves respectively perpendicular to a first axis and a second axis. The surfaces of the driver bodies and the proof masses and the corresponding stripe electrodes of the plates thereof are respectively formed a driving capacitors and a sensing capacitors. The driving capacitor drives the proof masses to vibrate in the opposite direction along the first axis. If a z-axial angular velocity input, a Coriolis force makes the two masses vibrate in the opposite direction along the second axis. If a first axial acceleration input, a specific force makes the two masses move in the same direction along the first axis. If a second axial acceleration input, a specific force makes the two masses move in the same direction along the second axis. Both inertial forces make the sensing capacitances change. One z-axial solid-state gyroscopes and two in-plane axial gyroscopes can be designed on a single chip to form a complete three-axis inertial measurement unit.
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Chen Shyu-Mou
Kau Chung-Ta
Tzuoo Sheau-Shi
Birch & Stewart Kolasch & Birch, LLP
Chung-Shan Institute of Science and Technology
Hanley John C.
Williams Hezron
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