SOI-MEMS gyroscope having three-fold symmetry

Details SOI-MEMS gyroscope having three-fold symmetry SOI-MEMS gyroscope having three-fold symmetry

2007-09-11

2007-09-11

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

11070510

ABSTRACT:
A SOI-MEMS gyroscope has a three fold symmetrical construction such that is symmetrical in the x direction, the y direction and diagonally. The gyroscope is suspended above a silicon substrate by lateral flexures that are located at the corners of the proof mass and by central flexures that are positioned at the center regions of the proof mass. The proof mass, lateral flexures, and central flexures are formed of a silicon composition with the flexures supporting the proof mass such that the proof mass will not touch the underlying base silicon substrate even when subjected to extreme G forces. Comb finger actuators apply an electrostatic force to the proof mass in the x direction; and, when experiencing an external rotational rate around the z-axis, the Coriolis force acts along the y direction and the resulting deflection is sensed by a pair of comb-finger capacitors connected as a differential capacitive voltage divider.

REFERENCES:
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patent: 6497147 (2002-12-01), Kato et al.
patent: 6539801 (2003-04-01), Gutierrez
M. Kranz et al., “A Single Layer Silicon-On-Insulator MEMS Gyroscope for Wide Dynamic Range and Harsh Environment Applications,” SPIE, 4559, pp. 5-16, Oct. 2001.
M. Kranz, S. Burgett et al., “A Wide Dynamic Range Silicon-On-Insulator MEMS Gyroscope with Digital Force Feedback”, Proc. of Transducers '03, Jun. 2003, 1D4.1.

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