Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-05-30
2006-05-30
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120, C073S504140
Reexamination Certificate
active
07051590
ABSTRACT:
A movable microstructure includes a first finger set comprising two or more first fingers affixed to a substrate and extending substantially parallel to a defined displacement axis towards a proof-mass. The movable microstructure further includes a second finger set comprising at least one second finger, each member of the second finger set extending substantially parallel to the displacement axis from the proof-mass, terminating between two first fingers. Each second finger is substantially closer to one of the two first fingers between which it terminates. The first finger set, in conjunction with the second finger set, form two terminals of a capacitor. An electrical circuit is included that provides a voltage across the capacitor to generate a position-dependent force, the position-dependent force having a component along an axis substantially orthogonal to the displacement axis, the magnitude of the position-dependent force varying in proportion to displacement along the displacement axis.
REFERENCES:
patent: 4061043 (1977-12-01), Stiles
patent: 4511848 (1985-04-01), Watson
patent: RE32931 (1989-05-01), Staudte
patent: RE33479 (1990-12-01), Juptner et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5203208 (1993-04-01), Bernstein
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5383362 (1995-01-01), Putty et al.
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5419194 (1995-05-01), Varnham et al.
patent: 5450751 (1995-09-01), Putty et al.
patent: 5481914 (1996-01-01), Ward
patent: 5488863 (1996-02-01), Mochida et al.
patent: 5495761 (1996-03-01), Diem et al.
patent: 5505084 (1996-04-01), Greiff et al.
patent: 5505085 (1996-04-01), Kasanami et al.
patent: 5530342 (1996-06-01), Murphy
patent: 5563343 (1996-10-01), Shaw et al.
patent: 5569852 (1996-10-01), Marek et al.
patent: 5597955 (1997-01-01), Leger et al.
patent: 5600064 (1997-02-01), Ward
patent: 5604309 (1997-02-01), Ward
patent: 5608351 (1997-03-01), Ward
patent: 5616864 (1997-04-01), Johnson et al.
patent: 5621171 (1997-04-01), Fell
patent: 5631422 (1997-05-01), Sulzberger et al.
patent: 5635638 (1997-06-01), Geen
patent: 5635639 (1997-06-01), Greiff et al.
patent: 5635640 (1997-06-01), Geen
patent: 5635739 (1997-06-01), Grieff et al.
patent: 5635787 (1997-06-01), Mori et al.
patent: 5652374 (1997-07-01), Chia et al.
patent: 5656777 (1997-08-01), Petri et al.
patent: 5672949 (1997-09-01), Ward
patent: 5696322 (1997-12-01), Mori et al.
patent: 5696420 (1997-12-01), Inanaga et al.
patent: 5698784 (1997-12-01), Hotelling et al.
patent: 5739410 (1998-04-01), Fell
patent: 5992233 (1999-11-01), Clark
patent: 6122964 (2000-09-01), Mohaupt et al.
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6230563 (2001-05-01), Clark et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6253612 (2001-07-01), Lemkin et al.
patent: 6296779 (2001-10-01), Clark et al.
patent: 6450031 (2002-09-01), Sakai et al.
Clark, W.A., Micromachined Vibratory Rate Gyroscopes, Doctoral Dissertation, University of California, 1997.
Juneau, T.N., Micromachined Dual Input Axis Rate Gyroscope, Doctoral Dissertation, University of California, 1997.
Roessig, T.A. W., Integrated MEMS Tuning Fork Oscillators for Sensor Applications, Doctoral Dissertation, Univeristy of California, 1998.
Lemkin, M.A., Micro Accelerometer Design with Digital Feedback Control, Doctoral Dissertation, University of California, 1997.
Clark, W.A., Howe, R.T., Horowitz, R., “Surface micromachined z-axis vibratory rate gyroscope,”IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 283-287, Jun. 1996.
Geiger, et al., “New Designs of Micromachined Vibrating Rate Gyroscopes with Decoupled Oscillation Modes,”Transducers 97, Chicago, IL pp. 1129-1132, Jun. 1997.
Clark William A.
Juneau Thor N.
Lemkin Mark A.
Roessig Allen W.
Analog Devices IMI, Inc.
Kwok Helen
Vierra Magen Marcus & DiNiro LLP
LandOfFree
Structure for attenuation or cancellation of quadrature error does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Structure for attenuation or cancellation of quadrature error, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Structure for attenuation or cancellation of quadrature error will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3643532