Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-02-24
1999-06-08
Williams, Hezron
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
G01C 1900
Patent
active
059111569
ABSTRACT:
A micromechanical tuning fork gyroscope having two center electrodes is disclosed. The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes are equal, and hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does effect sense axis output signals.
REFERENCES:
patent: Re32931 (1989-05-01), Staudte
patent: Re33479 (1990-12-01), Juptner et al.
patent: 3053095 (1962-09-01), Koril et al.
patent: 3251231 (1966-05-01), Hunt et al.
patent: 3370458 (1968-02-01), Dillon
patent: 3696429 (1972-10-01), Tressa
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4122448 (1978-10-01), Martin
patent: 4144764 (1979-03-01), Hartzell, Jr.
patent: 4155257 (1979-05-01), Wittke
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4336718 (1982-06-01), Washburn
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4406992 (1983-09-01), Kurtz et al.
patent: 4411741 (1983-10-01), Janata
patent: 4414852 (1983-11-01), McNeill
patent: 4447753 (1984-05-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4499778 (1985-02-01), Westhaver et al.
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4524619 (1985-06-01), Staudte
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4585083 (1986-04-01), Nishiguchi
patent: 4590801 (1986-05-01), Merhav
patent: 4592242 (1986-06-01), Kempas
patent: 4596158 (1986-06-01), Strugach
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Kane
patent: 4621925 (1986-11-01), Masuda et al.
patent: 4628283 (1986-12-01), Reynolds
patent: 4629957 (1986-12-01), Walters et al.
patent: 4639690 (1987-01-01), Lewis
patent: 4644793 (1987-02-01), Church
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4653326 (1987-03-01), Danel et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665605 (1987-05-01), Kempas
patent: 4670092 (1987-06-01), Motamedi
patent: 4671112 (1987-06-01), Kimura et al.
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4706374 (1987-11-01), Murkami
patent: 4712439 (1987-12-01), North
patent: 4727752 (1988-03-01), Peters
patent: 4735506 (1988-04-01), Pavlath
patent: 4736629 (1988-04-01), Cole
patent: 4743789 (1988-05-01), Puskas
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4747312 (1988-05-01), Herzl
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4761743 (1988-08-01), Wittke
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4792676 (1988-12-01), Hojo et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4815472 (1989-03-01), Wise et al.
patent: 4834538 (1989-05-01), Heeks et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4869107 (1989-09-01), Murakami
patent: 4881410 (1989-11-01), Wise et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4890812 (1990-01-01), Chechile et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4898032 (1990-02-01), Voles
patent: 4899587 (1990-02-01), Staudte
patent: 4900971 (1990-02-01), Kawashima
patent: 4901586 (1990-02-01), Blake et al.
patent: 4916520 (1990-04-01), Kurashima
patent: 4922756 (1990-05-01), Henrion
patent: 4929860 (1990-05-01), Hulsing, II et al.
patent: 4981359 (1991-01-01), Tazartes et al.
patent: 5001383 (1991-03-01), Kawashima
patent: 5013396 (1991-05-01), Wise et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5038613 (1991-08-01), Takenaka et al.
patent: 5055838 (1991-10-01), Wise et al.
patent: 5060039 (1991-10-01), Weinberg et al.
patent: 5090809 (1992-02-01), Ferrar
patent: 5094537 (1992-03-01), Karpinski, Jr.
patent: 5138883 (1992-08-01), Paquet et al.
patent: 5195371 (1993-03-01), Grieff
patent: 5203208 (1993-04-01), Bernstein
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5576250 (1996-11-01), Diem et al.
patent: 5604312 (1997-02-01), Lutz
patent: 5635638 (1997-06-01), Geen
patent: 5728936 (1998-03-01), Lutz
patent: 5757103 (1998-05-01), Lee et al.
patent: 5780739 (1998-07-01), Kang et al.
Barth, P.W. et al., "A Monolithic Silicon Accelerometer With Integral Air Damping and Overrange Protection", 1988 IEEE, pp. 35-38.
Boxenhorn, B., et al., "An Electrostatically Rebalanced Micromechanical Accelerometer," AIAA Guidance, Navigation and Control Conference, Boston, Aug. 14-16, 1989, pp. 118-122.
Boxenhorn, B., et al., "Micromechanical Inertial Guidance System and its Application", Fourteenth Biennial Guidance Test Symposium, vol. 1, Oct. 3-5, 1989, pp. 113-131.
Boxenhorn, B., et al., "Monolithic Silicon Accelerometer", Transducers '89, Jun. 25-30, 1989, pp.273-277.
Boxenhorn, B., et al., "A Vibratory Micromechanical Gyroscope", AIAA Guidance, Navigation and Control Conference, Minneapolis, Aug. 15-17, 1988, pp. 1033-1040.
Howe, R., et al., "Silicon Micromechanics: Sensors and Actuators on a Chip", IEEE Spectrum, Jul. 1990, pp. 29-35.
Moskalik, L., "Tensometric Accelerometers with Overload Protection", Meas. Tech. (USA), vol. 22, No. 12, Dec. 1979 (publ. May 1980), pp. 1469-1471.
Nakamura, M., et al., "Novel Electrochemical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC", Digest of Technical Papers(1987), Institute of Electrical Engineers of Japan, pp. 112-115.
Petersen, K.E., et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry", IEEE, vol. ED-29 No. 1 (Jan. 1982), pp. 23-27.
Petersen, Kurt E., et al., "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, May 1982 pp. 420-457.
"Quartz Rate Sensor Replaces Gyros", Defense Electronics, Nov. 1984, p. 177.
Rosen, Jerome, "Machining In the Micro Domain", Mechanical Engineering, Mar. 1989, pp. 40-46.
Teknekron Sensor Development Corporation, article entitled "Micro-Vibratory Rate Sensor", 1080 Marsh Road, Menlo Park, CA 94025, 2 pages, undated.
Bryzek, Janusz et al., "Micromachines on the March", IEEE Spectrum, May 1994, pp. 20-31.
IEEE Robotics & Automation Soc, in coop. w/ASME Dynamic Systems & Control Div., "Micro Electro Mechanical Systems, An Investigation of Mirco Structures, Sensors, Actuators, Machines and Systems", IEEE Cat. #93CH3265-6, Library of Congress #92-56273, Ft. Lauderdale, Fl. Feb. 7-10, 1993.
Hildebrant Eric M.
Kourepenis Anthony S.
Niles Lance C.
Ward Paul A.
Weinberg Marc S.
Moller Richard A.
The Charles Stark Draper Laboratory Inc.
Williams Hezron
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