Magnetofluidic accelerometer with capacitive sensing of...
Magnetofluidic accelerometer with partial filling of cavity...
Matched multiplier circuit having reduced phase shift for...
Measurement by gyroscopic system
Measuring device and measured quantity sensor having coupled...
Mechanical resonator for a rotation sensor
MEMS gyroscope having mass vibrating vertically on substrate
MEMS gyroscope with horizontally oriented drive electrodes
MEMS gyroscope with output oscillation about the normal to...
MEMS gyroscope with parametric gain
MEMS load cell and strain sensor
MEMS sensor with single central anchor and motion-limiting...
MEMS teeter-totter accelerometer having reduced non-linearty
MEMS-integrated inertial measurement units on a common...
Method and apparatus for a micromachined multisensor
Method and apparatus for compensation of micromachined sensors
Method and apparatus for generating driving signals for a vibrat
Method and apparatus for shaping and enhancing acoustical levita
Method and system for monitoring a sensor arrangement
Method for actively balancing a vibration structure gyroscope se