Spring for a resonance ring of an angular rate sensor

Details Spring for a resonance ring of an angular rate sensor Spring for a resonance ring of an angular rate sensor

1998-12-18

2000-10-10

Kwok, Helen C.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350412, 7350418, G01P 904, G01P 1514

Patent

active

06128954&

ABSTRACT:
A motion sensor having a sensing ring and electrodes formed on or in a surface region of a substrate, such as a silicon chip. The sensing ring is supported above the substrate by a number of spring members extending radially from a hub, so that the ring has an axis of rotation through the hub. The electrodes are formed to closely surround the ring, with some of the electrodes being adapted to induce vibration in the ring, while others detect angular and radial deflections of the ring. Finally, the spring members are substantially S-shaped with substantially C-shaped first and second portions having different radii of curvature. Configuring the spring members to have two portions of different radii of curvature substantially produces in the sensing ring the elliptical vibration mode shape of an ideal ring.

REFERENCES:
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patent: 5872313 (1999-02-01), Zarabadi et al.
patent: 5889207 (1999-03-01), Lutz
patent: 5915276 (1999-06-01), Fell

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