Small angle bias measurement mechanism for MEMS instruments

Details Small angle bias measurement mechanism for MEMS instruments Small angle bias measurement mechanism for MEMS instruments

2007-04-24

2009-06-23

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120, C073S001770

Reexamination Certificate

active

07549334

ABSTRACT:
A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is oscillated about an oscillation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

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