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Thin film MEMS sensors employing electrical sensing and...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Three axis inertial measurement unit with counterbalanced, low i

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Torsional nonresonant z-axis micromachined gyroscope with...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Torsional nonresonant z-axis micromachined gyroscope with...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Torsional rate sensor with momentum balance and mode decoupling

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Torsional rate sensor with momentum balance and mode decoupling

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Torsional rate sensor with momentum balance and mode decoupling

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Transducer, electronic equipment, and method of adjusting...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Trenches to reduce charging effects and to control out-of-plane

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Triaxial angular rate and acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Triaxial angular rate and acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Triaxial angular rate and acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tubular coriolis force driven piezoelectric gyroscope...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuned coriolis angular rate measuring device

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Tuning fork gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuning fork gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuning fork gyroscopes, accelerometers, and other sensors...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuning fork gyroscopes, accelerometers, and other sensors...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuning fork type gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Tuning fork type oscillator and vibration gyroscope using same

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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