Micro-electromechanical pressure sensor

Micro-electromechanical sensor

Micro-mechanical capacitive inductive sensor for detection...

Micro-mechanical capacitive inductive sensor for wireless...

Micro-mechanical capacitive inductive sensor for wireless...

Microcomputerized force transducer

Microdevice for sensing a force

Microelectromechanical correlation device and method

Micromachined acoustic transducer and method of operating...

Micromachined capacitive RF pressure sensor

Micromachined differential pressure transducers

Micromachined integrated pressure sensor with oxide polysilicon

Micromechanical component and pressure sensor having a...

Micromechanical differential pressure sensor device

Micromechanical piezoresistive pressure sensor device

Micromechanical pressure sensor

Micromechanical pressure sensor system

Micromechanical sensor and method for operating the sensor

Micromechanical sensor element

Microsystem with a flexible membrane pressure sensor