Micromechanical pressure sensor system

Details Micromechanical pressure sensor system Micromechanical pressure sensor system

2006-11-02

2009-02-24

Patel, Harshad (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S777000, C073S723000, C257S415000, C438S053000

Reexamination Certificate

active

07493819

ABSTRACT:
A micromechanical pressure sensor includes a substrate having a front side and a back side, the front side facing a medium and the back side being situated on the opposite side of the substrate. A sensor diaphragm having at least one sensor area is situated on the front side, and a recess or cavity is situated behind the sensor diaphragm, and electrical contacting is provided on the back side.

REFERENCES:
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patent: 5511428 (1996-04-01), Goldberg et al.
patent: 6388279 (2002-05-01), Sakai et al.
patent: 6550337 (2003-04-01), Wagner et al.
patent: 2007/0267708 (2007-11-01), Courcimault
patent: 100 32 579 (2002-01-01), None
patent: 103 23 559 (2004-12-01), None

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