Micro-electromechanical pressure sensor

Details Micro-electromechanical pressure sensor Micro-electromechanical pressure sensor

2006-08-22

2006-08-22

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S717000, C073S753000

Reexamination Certificate

active

07093494

ABSTRACT:
A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.

REFERENCES:
patent: 4572000 (1986-02-01), Kooiman
patent: 5285097 (1994-02-01), Hirai
patent: 5853020 (1998-12-01), Widner
patent: 5965821 (1999-10-01), Grudzien
patent: 6405132 (2002-06-01), Breed et al.
patent: 6484080 (2002-11-01), Breed et al.
patent: 6526352 (2003-02-01), Breed et al.
patent: 6533316 (2003-03-01), Breed et al.
patent: 6648367 (2003-11-01), Breed et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6733036 (2004-05-01), Breed et al.
patent: 6738697 (2004-05-01), Breed
patent: 6741169 (2004-05-01), Magiawala et al.
patent: 6758089 (2004-07-01), Breed et al.
patent: 6768944 (2004-07-01), Breed et al.
patent: 261972 (1988-03-01), None
patent: 756164 (1997-01-01), None
patent: WO 2003/106952 (2003-12-01), None

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