Micro-mechanical capacitive inductive sensor for wireless...

Details Micro-mechanical capacitive inductive sensor for wireless... Micro-mechanical capacitive inductive sensor for wireless...

2006-03-28

2006-03-28

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07017419

ABSTRACT:
A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer. The capacitive transducer structure comprises a conductive movable diaphragm, a fixed counter electrode, and a predetermined air gap between said diaphragm and electrode. The diaphragm deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer.

REFERENCES:
patent: 3893228 (1975-07-01), George et al.
patent: 3916365 (1975-10-01), Glachino
patent: 4203327 (1980-05-01), Singh
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4625561 (1986-12-01), Mikkor
patent: 4763098 (1988-08-01), Glenn et al.
patent: 4881410 (1989-11-01), Wise et al.
patent: 5936164 (1999-08-01), Sparks et al.
patent: 6287256 (2001-09-01), Park et al.
patent: 6532834 (2003-03-01), Pinto et al.
patent: 6789429 (2004-09-01), Pinto et al.
patent: 2003/0230145 (2003-12-01), Pinto et al.
patent: 2004/0035211 (2004-02-01), Pinto et al.
patent: WO 2003/106592 (2003-12-01), None
Advanced Substrate Technologies: Build-Up Technologies (BUTS) and Build-Up Multilayers (BUMS) by Happy Holden Merix Inc.
International Search Report in International Application No. PCT/US2003/019121, filed Jun. 18, 2003.

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