Micro-mechanical capacitive inductive sensor for detection...

Details Micro-mechanical capacitive inductive sensor for detection... Micro-mechanical capacitive inductive sensor for detection...

2007-03-13

2007-03-13

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C438S070000

Reexamination Certificate

active

11009706

ABSTRACT:
A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer. The capacitive transducer structure comprises a conductive movable diaphragm, a fixed counter electrode, and a predetermined air gap between said diaphragm and electrode. The diaphragm deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer.

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Advanced Substrate Technologies: Build-Up Technologies (BUTS) and Build-Up Multilayers (BUMS) by Happy Holden MERIX Inc.

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