Micromechanical pressure sensor

Details Micromechanical pressure sensor Micromechanical pressure sensor

2006-06-06

2006-06-06

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S753000

Reexamination Certificate

active

07055392

ABSTRACT:
A micromechanical pressure sensor which is made up of at least one first component element and a second component element bordering on the first component element. In this context, the first component element includes at least one diaphragm and one cavity. The cavity is arranged or structured so that the medium to be measured gains access to the diaphragm through the cavity. In addition, in the second component element an opening is provided which guides the medium to be measured to the cavity. At least a part of the cavity represents an extension, without a transition, of the opening in the second component.

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patent: 199 57 556 (2001-05-01), None

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