Micromachined capacitive RF pressure sensor

Details Micromachined capacitive RF pressure sensor Micromachined capacitive RF pressure sensor

2005-09-20

2005-09-20

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

06945115

ABSTRACT:
A Capacitive Micromachined Ultrasonic RF (CMURF) pressure sensor is described. This micromachined pressure sensor has: pressure sensitive capacitance elements including a scalable array of micromachined cells of the type including electrodes carried by a sealed membrane supported above a common electrode with conductive lines interconnecting the electrodes having an electrostatic capacitance ΔCmchanging with a pressure to be detected; reference capacitance elements including a scalable array of micromachined cells of the type including electrodes carried by a stacked of membranes supported above a common electrode with conductive lines interconnecting the electrodes having an electrostatic capacitance Cmnot changing with the pressure. A method of operating a pressure sensor array is also described.

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