Micromechanical component and pressure sensor having a...

Details Micromechanical component and pressure sensor having a... Micromechanical component and pressure sensor having a...

2005-01-11

2005-01-11

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S717000

Reexamination Certificate

active

06840111

ABSTRACT:
A micromechanical component in which lateral deformations, i.e., deformations of the component parallel to its two main surfaces, are concentrated in a defined area of the component structure, making it possible to decouple lateral and vertical stresses in the component. The component structure includes at least one bellows-like structure in which lateral deformations of the component are concentrated. A pressure sensor having a micromechanical component of this type may be used, for example, for measured-value detection.

REFERENCES:
patent: 25 44 506 (1976-05-01), None
patent: 39 32 618 (1991-04-01), None
patent: 0 427 261 (1995-08-01), None
patent: 0 793 082 (1997-09-01), None
patent: 61 088121 (1986-05-01), None
patent: WO 97 39320 (1997-10-01), None

Affiliated with

Also associated with

Rating

Micromechanical component and pressure sensor having a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromechanical component and pressure sensor having a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical component and pressure sensor having a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3385254