Front end wafer staging with wafer cassette turntables and on-th
Front-opening unified pod closing/opening control structure
Fully automated and computerized conveyor based manufacturing li
Gas purge unit for a portable container
Gate valve for wafer processing system
High speed movement of workpieces in vacuum processing
High speed wafer handler
High vacuum dual stage load lock and method for loading and unlo
High vacuum dual stage load lock and method for loading and...
In-line sputter deposition system
In-situ substrate transfer shuttle
In-vacuum conveyance robot
Inflatable slit/gate valve
Integrated circuit wafer handling system
Integrated substrate handler having pre-aligner and storage...
Interback-type substrate processing device
Isolation chamber transfer apparatus
Kinetic extruder - a dry pulverized solid material pump
Latch sensor for pod transport gripper
Lid latch mechanism for clean box