Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1991-04-29
1993-08-10
Huppert, Michael S.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414222, 414416, 414939, 901 17, B65G 4907
Patent
active
052343030
ABSTRACT:
In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a rectilinear movement axis (R-axis) (1, 20) for conveying the workpiece 21, a magnetic seal 9 for shutting off a vacuum side A from an atmospheric air side B is applied to a rotation axis (.theta.-axis) 25 for rotating the R-axis (1, 20), and a vacuum bellows 14 for shutting off the vacuum side A from the atmospheric air side B is applied to a vertical movement axis (Z-axis) 17 for vertically moving the R-axis (1, 20) and the .theta.-axis 25, whereby sliding or rolling is avoided in the vacuum.
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Adams Bruce L.
Huppert Michael S.
Keenan James
Seiko Instruments Inc.
Wilks Van C.
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