Integrated circuit wafer handling system

Details Integrated circuit wafer handling system Integrated circuit wafer handling system

1984-03-26

1986-08-05

Spar, Robert J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

294 864, 269156, 269254R, 104165, 104287, 2504401, B25J 300

Patent

active

046040200

ABSTRACT:
A system for transfering discs, such as integrated circuit wafers during manufacture, from a location at atmospheric pressure into a vacuum chamber of an electron microscope or the like with a minimum of vacuum loss to the chamber. A wafer is placed on a moveable holder in a small sealable chamber having a sealable top door and which is mounted to the outer surface of the vacuum chamber at the position of a small gate through the chamber wall. The wafer holder carries a magnet that is magnetically coupled to a second magnet outside of the sealable chamber and which is motor driven to transfer the wafer through the gate and into the vacuum chamber and upon a stage that has a three-point grasping mechanism operated by the leading end of the moving wafer holder. The wafer holder includes a solenoid operated clip that engages the leading edge of a wafer during pick-up of the wafer for its removal from the vacuum chamber. Because of the differences in volumes of the sealed exterior chamber and the vacuum chamber, the opening of the gate between them admits a very small amount of atmospheric pressure air and does not materially alter the vacuum pressure in the larger vacuum chamber.

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patent: 4392435 (1983-07-01), Moody et al.
patent: 4465416 (1984-08-01), Burkhalter et al.
patent: 4467210 (1984-08-01), Sugihara et al.
patent: 4503807 (1985-03-01), Nakayama et al.

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