High speed wafer handler

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

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Details

414292, B65G 6500

Patent

active

050982451

ABSTRACT:
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing using, for example, a SEM. This system provides low contamination from atmospheric conditions both on loading and unloading the wafers.

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