Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1990-11-05
1992-03-24
Bucci, David A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414292, B65G 6500
Patent
active
050982451
ABSTRACT:
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing using, for example, a SEM. This system provides low contamination from atmospheric conditions both on loading and unloading the wafers.
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Abel Alan C.
Achilles Alan H.
Toro-Lira Guillermo L.
Bucci David A.
Keenan James
Miller Paul R.
U.S. Philips Corporation
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