Gate valve for wafer processing system

Details Gate valve for wafer processing system Gate valve for wafer processing system

1986-04-28

1987-12-29

Aschenbrenner, Peter A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414225, B65G 5102

Patent

active

047157640

ABSTRACT:
A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.

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