Interback-type substrate processing device

Details Interback-type substrate processing device Interback-type substrate processing device

2001-12-17

2008-08-05

Fox, Charles A. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C204S298150

Reexamination Certificate

active

07407358

ABSTRACT:
An interback-type device in which a substrate9is carried into the device from one side of the device and is inverted in the device to be carried out and returned to the same side, a plurality of vacuum processing chambers21, 22, 23are longitudinally-provided and hermetically connected, and a carry system which passes through these vacuum chambers for carrying the substrate along established carry lines94, 95L,95R is provided. The carry line includes an outward carry line94toward an inversion position and return carry lines95L,95R returning from the inversion position, and the outward line94and return carry lines94, 95L,95R are different parallel paths, and the return carry lines95L,95R are branched in plurality. The outward carry line94and return carry lines95L,95R are established to pass through the same three processing chambers21, 22, 23.

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U.S. Appl. No. 09/927,932, filed Aug. 13, 2001, Nobuyuki Takahashi—“Substrate Processing Apparatus”.

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