Latch sensor for pod transport gripper

Details Latch sensor for pod transport gripper Latch sensor for pod transport gripper

2005-08-09

2005-08-09

Tran, Khoi H. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S217000, C414S222020, C414S222070, C414S222130, C414S225010, C414S935000, C414S940000, C901S033000, C901S047000, C294S081530

Reexamination Certificate

active

06926489

ABSTRACT:
A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp disposed on interior sides of the left bar and the right bar, respectively, to clamp a pod, such as a front-opening unified pod (FOUP), for transport. A number of latches are disposed on the cross bar, and correspond to a number of latch holes of the pod. The gripper has at least one latch sensor disposed on either the left bar, the right bar, or both, to determine whether the latches have properly engaged the latch holes of the pod.

REFERENCES:
patent: 5110248 (1992-05-01), Asano et al.
patent: 5803696 (1998-09-01), Tsai et al.
patent: 6419438 (2002-07-01), Rosenquist
patent: 6468021 (2002-10-01), Bonora et al.
patent: 6641350 (2003-11-01), Nakashima et al.

Affiliated with

Also associated with

Rating

Latch sensor for pod transport gripper does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Latch sensor for pod transport gripper, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Latch sensor for pod transport gripper will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3517948