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Wafer boat

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer boat

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer boat and method for treatment of substrates

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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Wafer boat for a vertical furnace

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent

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Wafer boat with arcuate wafer support arms

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer carrier

Heating – Having timing – programming or cycling control means – Of handling or treatment of discrete work batch or unit
Reexamination Certificate

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Wafer clamp for a heater assembly

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer handling apparatus

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent

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Wafer handling apparatus and method

Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent

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Wafer hanger useful for thermally treating semiconductor wafers

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer heat-treatment system and wafer heat-treatment method

Heating – With work cooling structure
Reexamination Certificate

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Wafer heating device and method of controlling the same

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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Wafer holder

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer processing apparatus

Heating – With work cooling structure
Reexamination Certificate

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Wafer scale thermal stress fixture and method

Heating – Heating or heat retaining work chamber structure
Reexamination Certificate

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Wafer softlanding system and cooperative door assembly

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer tray construction

Heating – Accessory means for holding – shielding or supporting work...
Patent

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Wafer treatment chamber having thermal reflector

Heating – Work chamber having heating means – Work chamber having gaseous material supply or removal...
Reexamination Certificate

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