Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent
1983-03-28
1985-03-26
Camby, John J.
Heating
Processes of heating or heater operation
Treating an article, container, batch or body as a unit
198341, 198344, 198345, 198627, 432122, F27D 300, F27B 914, B65G 4300, B65G 1500
Patent
active
045070784
ABSTRACT:
A wafer handling method and apparatus insures proper centering of a wafer at a work station and controls the heat transferred to the wafer in a baking operation. The amount of heat transferred and the rate at which the heat is transferred to the wafer are regulated by controlling the distance between the wafer and a hot plate. The hot plate is maintained at a constant temperature higher than the bake out or equilibrium temperature to which the wafer is to be heated.
REFERENCES:
patent: 3044297 (1962-07-01), Hanken
patent: 3870460 (1975-03-01), Flint
patent: 4217977 (1980-08-01), Tam
patent: 4276603 (1981-06-01), Beck et al.
Ashjaee Jalal
Kung Susan W.
Kuwaki Nobuo B.
Ngo Tuan M.
Tam Johann
Camby John J.
Feix Donald C.
Silicon Valley Group Inc.
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