Wafer boat

Details Wafer boat Wafer boat

1980-11-24

1982-10-26

Smith, John D.

Heating

Accessory means for holding, shielding or supporting work...

432 5, 432261, 118500, 118729, 118725, 118900, 211 40, 211 41, B05C 1302

Patent

active

043559743

ABSTRACT:
A wafer processing boat is provided with parallel slots that support each wafer at a slight angle with respect to vertical so that the wafers lean by gravity in a uniform manner and are thereby arranged in spaced parallel relationship. This enables the tolerances within the slots to be quite large with respect to the width of the wafer edges thus facilitating insertion and removal of the wafers while minimizing wafer damage and increasing wafer processing uniformity.

REFERENCES:
patent: 3486631 (1969-12-01), Radman
patent: 3610613 (1971-10-01), Worden
patent: 3678893 (1972-07-01), Bell
patent: 3826377 (1974-07-01), Bachmann
patent: 3922467 (1974-11-01), Pinchon
patent: 3998333 (1976-12-01), Kamada
patent: 4129090 (1978-12-01), Inaniwa et al.
patent: 4256229 (1981-03-01), Lee

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