Wafer hanger useful for thermally treating semiconductor wafers

Details Wafer hanger useful for thermally treating semiconductor wafers Wafer hanger useful for thermally treating semiconductor wafers

1989-10-20

1990-10-30

Bennet, Henry A.

Heating

Accessory means for holding, shielding or supporting work...

432258, 432259, 432261, 118500, 118502, 211 41, F27D 500

Patent

active

049665499

ABSTRACT:
A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.

REFERENCES:
patent: 4127969 (1978-12-01), Hoshi et al.
patent: 4317522 (1982-03-01), Garrett
patent: 4515104 (1985-05-01), Lee
patent: 4566839 (1986-01-01), Butler
patent: 4802842 (1987-02-01), Hirayama

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