Wafer support tool for heat treatment and heat treatment...

Details Wafer support tool for heat treatment and heat treatment... Wafer support tool for heat treatment and heat treatment...

2008-07-01

2008-07-01

Wilson, Gregory A (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

C211S041180, C118S728000, C118S729000

Reexamination Certificate

active

10549805

ABSTRACT:
The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be otherwise caused by high temperature heat treatment and a heat treatment apparatus. The present invention is directed to a wafer support tool for heat treatment comprising: a plurality of wafer support members for supporting a wafer to be heat treated; and a support member holder for holding the wafer support members, wherein the wafer support members each has a contact portion with the wafer, at least one of the contact portions being movable relative to the support member holder.

REFERENCES:
patent: 6099302 (2000-08-01), Hong et al.
patent: 6953338 (2005-10-01), Kreiser et al.
patent: 7204887 (2007-04-01), Kawamura et al.
patent: 02-139935 (1990-05-01), None
patent: 07-161654 (1995-06-01), None
patent: 08-107081 (1996-04-01), None
patent: 09-129567 (1997-05-01), None
patent: 2000-91406 (2000-03-01), None
patent: 2002-164300 (2002-06-01), None
International Search Report.

Affiliated with

Also associated with

Rating

Wafer support tool for heat treatment and heat treatment... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer support tool for heat treatment and heat treatment..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer support tool for heat treatment and heat treatment... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3950885