Heating – Accessory means for holding – shielding or supporting work...
Patent
1982-01-28
1983-12-06
Camby, John J.
Heating
Accessory means for holding, shielding or supporting work...
373 18, 432258, F27D 500
Patent
active
044190760
ABSTRACT:
Wafer tray construction for use in a gas plasma reactor. A plurality of the trays are arranged in an array, with an overlap at the adjacent edges of the trays to prevent line-of-sight communication between the trays and ion bombardment of the support on which the trays are mounted. In one disclosed embodiment, the edges of the trays are configured to form the overlap, and in a second embodiment bars inserted between the trays cooperate with the edge portions to form the overlap.
REFERENCES:
patent: 1029709 (1912-06-01), Norrlander
patent: 2297286 (1942-09-01), Book
patent: 3475070 (1969-10-01), Hoshall
Applied Materials Inc.
Camby John J.
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