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Method for fabricating mems and microfluidic devices using...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method for fabricating metal wirings

Etching a substrate: processes – Forming or treating electrical conductor article
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Method for fabricating metallization patterns on an electronic s

Etching a substrate: processes – Forming or treating electrical conductor article
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Method for fabricating micro and nano structures

Etching a substrate: processes – Forming or treating optical article
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Method for fabricating micro optical elements using CMP

Etching a substrate: processes – Forming or treating optical article
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Method for fabricating micro-structures with various surface...

Etching a substrate: processes – Forming groove or hole in a substrate which is subsequently...
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Method for fabricating microelectromechanical structures for...

Etching a substrate: processes – Forming or treating thermal ink jet article
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Method for fabricating micromachined members coupled for...

Etching a substrate: processes – Forming or treating optical article
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Method for fabricating microneedle array and method for...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
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Method for fabricating microstructure and microstructure

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for fabricating microstructures with deep anisotropic...

Etching a substrate: processes – Gas phase and nongaseous phase etching on the same substrate
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Method for fabricating nano-sized diamond whisker, and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for fabricating oxide superconducting device

Etching a substrate: processes – Forming or treating josephson junction article
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Method for fabricating patterned magnetic recording media

Etching a substrate: processes – Forming or treating article containing magnetically...
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Method for fabricating patterned magnetic recording media

Etching a substrate: processes – Forming or treating article containing magnetically...
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Method for fabricating planar optical waveguide devices

Etching a substrate: processes – Forming or treating optical article
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Method for fabricating semiconductor device

Etching a substrate: processes – Gas phase etching of substrate
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Method for fabricating semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method for fabricating spacer support structures useful in flat

Etching a substrate: processes – Forming or treating optical article – Phosphor screen
Patent

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Method for fabricating suspension members for micromachined sens

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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