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Antireflective hard mask compositions

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating resistive material
Reexamination Certificate

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Aperture fill

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Aperture grill for use in cathode ray tube and method for...

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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Aperture plate and a method of manufacturing the same

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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Apodized micro-lenses for Hartmann wavefront sensing and...

Etching a substrate: processes – Forming or treating optical article – Lens
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Apparatus and method for contacting a conductive layer

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Apparatus and method for controlling the voltage applied to...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Apparatus and method for demetallizing a metallized film

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
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Apparatus and method for detecting an endpoint in a vapor...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Apparatus and method for detecting end point of post treatment

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Apparatus and method for double-sided polishing semiconductor wa

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Apparatus and method for electrostatically shielding an...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Apparatus and method for enhancing the uniform etching...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Apparatus and method for flow of process gas in an...

Etching a substrate: processes – Gas phase etching of substrate
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Apparatus and method for fluid processing of electronic packagin

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
Patent

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Apparatus and method for manufacturing an intracutaneous...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Apparatus and method for monitoring processing of a substrate

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Apparatus and method for patterning a surface

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Apparatus and method for plasma etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Apparatus and method for radio frequency de-coupling and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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