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Local dry etching method

Etching a substrate: processes – Planarizing a nonplanar surface
Reexamination Certificate

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Local dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Low ceiling temperature process for a plasma reactor with...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Low cost field emission based print head and method of making

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Patent

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Low Cu percentages for reducing shorts in AlCu lines

Etching a substrate: processes – Forming or treating electrical conductor article
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Low density high frequency process for a parallel-plate electrod

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Low frequency inductive RF plasma reactor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Low lead release plumbing components made of copper based...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Low loss optical waveguide device

Etching a substrate: processes – Forming or treating optical article
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Low loss SOI/CMOS compatible silicon waveguide and method of...

Etching a substrate: processes – Forming or treating optical article
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Low resistance, thermally stable electrode structure for electro

Etching a substrate: processes – Forming or treating electrical conductor article
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Low temperature encapsulation system

Etching a substrate: processes – Forming or treating article containing magnetically...
Patent

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Low temperature etching in cold-wall CVD systems

Etching a substrate: processes – Gas phase etching of substrate
Patent

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Low temperature material bonding technique

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Low-aberration deflectors for use in charged-particle-beam...

Etching a substrate: processes – Forming or treating electrical conductor article
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Luminescent screen with mask layer

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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