Low temperature encapsulation system

Details Low temperature encapsulation system Low temperature encapsulation system

1997-09-04

1999-08-03

Powell, William

Etching a substrate: processes

Forming or treating article containing magnetically...

216 33, 216 36, 216 41, B44C 122

Patent

active

059321130

ABSTRACT:
A method for preparing the air bearing surface of a slider for etch patterning including the steps of applying a first thin film to a carrier, applying a second thin film to the carrier, the first thin film and the second thin film separated by a recess, each of the first and second thin films having respective first and second air bearing surfaces, applying an adhesive film over the first and second thin films, depositing a fluid in the recess, the fluid held in the recess by the adhesive film, curing the fluid, and removing the adhesive film. The method of the invention may also include coating the first and second air bearing surfaces with an etch mask, developing the etch mask, and patterning the first and second air bearing surfaces.

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patent: 5516430 (1996-05-01), Hussinger
patent: 5548886 (1996-08-01), Kojima et al.
patent: 5613293 (1997-03-01), Slade et al.
patent: 5617273 (1997-04-01), Carr et al.

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