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Stopper manufacturing method of a silicon micromachining structu

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Substrate and method for microscopical observation of amorphous

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Surface&mdash;micromachined rotatable member having a...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Surface-micromachined chain for use in...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Surface-micromachined microfluidic devices

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Surfactant-enhanced protection of micromechanical components...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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System for fabricating nanocoils using a wet etch technique

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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