Semiconductor vibration detection device with lever structure

Sensitive key device having a detective surface in direct contac

Sensor array

Sensor detector element for an electrical hygrometer

Sensor for capacitively measuring pressure in a gas

Sensor for capacitively measuring the level of material in a con

Sensor for detecting an amount of rain

Shock proof adjustable low-loss capacitor

Silicon capacitive pressure sensor having a glass dielectric dep

Silicon-glass-silicon capacitive pressure transducer

Silicon-on-insulator capacitive surface micromachined absolute p

SOI actuators and microsensors

SOI diaphgram sensor

SOI diaphragm sensor

SOI diaphragm sensor

Solid state cell

Solid state pressure sensors

Spiral configuration of electrodes and dielectric material for s

Subminiaturized adjustable capacitor

Substrates with slotted metals and related methods