Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1993-03-05
1996-02-06
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
73718, 29 2541, H01G 700
Patent
active
054900344
ABSTRACT:
The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which may incorporate electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.
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Morrison, Jr. Richard H.
Zavracky Paul M.
Kopin Corporation
Ledynh Bot L.
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